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ZnO Nanostructures Prepared by RF Sputtering

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Sona Flickyngerova, Vladimir Tvarozek, Ivan Novotny, Alexander Satka, Pavol Sutta

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Abstract

ZnO is shortly reviewed as significant material for nanotechnology. Sputtered ZnO thin films showed colummarpolycrystalline structure with preffered orientation in <002> direction, resistivity ~ 1 Wcm and optical bandgap Eg = 3,33 eV. Nanoclusters of Au and ZnO were formed by use of RF sputtering.

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