ZnO Nanostructures Prepared by RF Sputtering
Sona Flickyngerova, Vladimir Tvarozek, Ivan Novotny, Alexander Satka, Pavol Sutta
DOI:
Abstract
ZnO is shortly reviewed as significant material for nanotechnology. Sputtered ZnO thin films showed colummarpolycrystalline structure with preffered orientation in <002> direction, resistivity ~ 1 Wcm and optical bandgap Eg = 3,33 eV. Nanoclusters of Au and ZnO were formed by use of RF sputtering.